Silicon on insulator (SOI) wafers for MEMS – supplier access
Silicon on insulator wafers (SOI wafers) offer excellent performance for advanced MEMS devices. SOI is a three-layered silicon-insulator-silicon substrate. This structure enables superior electrical and mechanical performance compared to silicon wafers.
LioniX International work with a range of SOI suppliers and as a one-stop-shop, we can find the right supplier for your application.
Silicon on Insulator wafer capabilities
SOI wafers are compatible with most of our clean room manufacturing processes. Specific capabilities for SOI wafer processing include:
- DRIE through device layer
- Release etch (BOX layer)
- Bonding and handle etchback
- Trench fill process
SOI wafer supplier specifications
We offer custom layer thickness and BOX thickness tailored to your application by working with the most appropriate supplier of silicon on insulator wafers for your specification.