ThermoFisher – SEM specimen heating and biasing holder


The FEI NanoEx-i/v is a specimen heating and biasing holder for in situ S/TEM imaging and elemental analysis at elevated temperatures.​


The customer needs micron sized, 20 nanometer thin membranes which can be heated uniformly to temperatures up to 1200 C.


We developed and are producing a solution based on LPCVD silicon nitride membranes and High Temperature Heaters capped also by LPCVD silicon nitride.