Sputtering process capabilities for thin film deposition
Sputtering is a deposition technique that can be used to apply various materials to the surface of wafers. Along with wafer etching, deposition is one of two major microfabrication processes.
LioniX International specializes in the deposition of a full range of metals using various multi-target systems and RF magneton sputtering for adhesion, conduction, antidiffusion, optical and magnetic use.
We use sputtering and thin film evaporation processes to deposit metals in the microfabrication of resistors, heaters, leads, thermocouples and bondpads. It also plays a vital role in many types of wafer bonding.