Bronkhorst – MEMS Gas flow sensor

Application

Anemometric gas flow sensor for applications in Microfluidics, Microchemistry, Analytics (GC, FID), Life Sciences (IQ⁺ flow).

Request

The customer needs type-T thermopiles on a membrane with low heat conductivity to sense the temperature profile generated by an integrated heater in a gas flow.

Solution

We developed and are producing a solution based on sputtering and etching of Cu / CuNi, KOH etching and Anodic Bonding and etchback of a Borosilicate glass wafer.