Manufacturing services for your custom MEMS device
Our comprehensive range of MEMS manufacturing services is available to you as part of your own MEMS design and manufacturing flow. Similarly, we offer full outsourcing of MEMS development and engineering as well as production as a partner with deep expertise in custom MEMS co-development.
Single step wafer services
Processes available on 100m and 150mm wafers include wafer bonding, deposition or oxidation.
- LPCVD Low stress silicon rich nitride (SiRN)
- LPCVD stoichiometric nitride (Si3N4)
- Thermal oxidation (SiO2)
- Metal evaporation