Inertial MEMS Sensors

Inertial MEMS typically comprise a proof mass made out of the device layer of a SOI wafer, such as in a MEMS accelerometer or a MEMS gyroscope. Inertial MEMS find their application in cell phones, cars, GPS, and other consumer applications, and are produced in millions. They are often available as off-the-shelf products.

Customers of LioniX International use their inertial MEMS typically for niche applications that cannot be obtained by the standard processes offered by other MEMS players. Other customers use inertial MEMS produced by LioniX International for prototyping.

Based on the same fabrication technology as used for accelerometers and gyroscopes, LioniX International also builds MEMS mirrors for various applications.