• Customized MEMS

    Flexible MEMS Foundry
    Process Development
    Product Manufacturing

MEMS Foundry

A custom MEMS wafer showing individual MEMS chips

Custom MEMS production and fabrication

We are a MEMS foundry with capabilities for volume fabrication of existing MEMS designs as well as the co-development of novel devices.
An engineer using a microscope to examine a MEMS chip wafer as part of MEMS development

MEMS process development and engineering

We optimized our engineering methodology to fit your requirements with a balance between proven processes, customized methods, and completely novel developments.
A MEMS on fabricated wafer

MEMS Design Support

Our unique strength is in developing custom MEMS manufacturing processes, from concept drawings to mask set, to precisely meet your specification.

Custom MEMS Solutions

Example of Gas Flow Sensor

Bronkhorst – Gas flow sensor

We developed an anemometric gas flow sensor for applications in microfluidics, microchemistry, and more.
A photo showing a microfluidic chip used for extraterrestrial life detection, developed by LioniX.

ESA – Life Marker Chip

A microfluidic chip comprising various reaction chambers, fluid channels, in- and outlets, conductivity and optical sensors, and a configurable rotary valve.

Onset – Conductivity sensor

We developed a non-contact, chemically inert, robust conductivity sensor with a range of almost 3 decades.

MEMS Technology

An image of a component layout on MEMS pH meter based on custom ISFET made by LioniX International.

Ion Sensitive Field-Effect Transistor (ISFET)

Welcome to The ISFET Factory! Our ISFET bare dies with Tantalum Oxide (Ta2O5) gates are an excellent base for your pH- or ion sensing system.
Optofluidics chip using customized MEMS technology at LioniX International

Optofluidics

We specialize in combining the advantages of microfluidics and integrated optical systems into one high-added value optofluidic chip.
Photo of a packaged wafer made by LioniX International

Wafer Level Packaging of MEMS

We use a plurality of wafer bonding techniques to protect your MEMS against mechanical and other environmental influences.

LioniX International is a MEMS foundry and leading independent supplier of customized MEMS solutions. Our expertise is product manufacturing from prototype to production volumes. We use standard process modules with flexible processes, meaning we are open to modify our standard processes if your product specifications require so.

We offer flexibility in design as well as in process. We are prepared to leave the standard processing routes and develop customized process variations and combinations to achieve manufacturable solutions meeting your specification requirements.

Our customer base consists of OEM’s, system integrators and startups looking for a MEMS solution.

Our MEMS foundry activities are driven by technology and as such our projects are not focused on any particular market. However, we experience a particular influx in the MEMS hot areas, such as bioMEMS, Microfluidics, Physical and Chemical Sensors, and Optofluidics.

MEMS activities at LioniX International take advantage from other expertise within the company: LioniX International has unique expertise in functional design and processing of Photonic Integrated Circuits for sensor and telecom applications. LioniX International also has in house facilities for Module Assembly, Opto-fluidic Systems, as well as facilities for Large Volume Production.

LioniX provides thermal oxidation for MEMS processing.

Oxidation

LioniX provides back end processing for MEMS

Back End Processes

LioniX provide evaporation processing for MEMS

Evaporation

LioniX provides photolithorgaphy processing for MEMS.

Lithography

LioniX provides sputtering for MEMS

Sputtering

LioniX provides wet etching for MEMS

Wet etching

LioniX provides wafer bonding for MEMS

Wafer bonding

LioniX provides PECVD processing for MEMS.

PECVD Processes

LioniX provides LPCVD processing for MEMS.

LPCVD

Contact us

We’re here to help. If you have any questions about how we can support your work, get in touch.

Speak with our team

Testimonials

The LioniX staff work closely with our engineers to constantly fine tune the production process – through prototype to volume manufacturing.

Lionix’s wide ranging cleanroom capabilities and in-depth understanding of MEMS manufacturing greatly facilitated the process, and so has their willingness to adopt novel techniques when the need arose.