University of Strasbourg – MEMS Microfluidic Optical Cavities

Application

Vibrational strong light-matter coupling (VSC) has emerged as an innovative approach for influencing molecular properties and chemical reactivity. The formation of hybrid states, induced by the coupling of N molecules with the optical mode, has been shown to alter reaction rates, chemical selectivity, electrochemical modulation, charge transfer equilibria and many other properties such as ionic conductivity, electrical conductivity, solvent polarity, crystallization or self-assembly.

Request

The University of Strasbourg Institute for Advanced Study (USIAS) requested the development of a microfluidic optical cavities for vibrational strong coupling (VSC) that are compatible with nuclear magnetic resonance (NMR) spectroscopy.

Solution

LioniX fabricated a Fabri-Perot cavity in a flowcell configuration based on semitransparent metallic mirrors, wet chemical etching of glass and silicon, and wafer bonding.