Novel approaches for halogen-free and sustainable etching of Silicon and Glass

About Project HaloFreeEtch

The HaloFreeEtch project aims to revolutionize semiconductor manufacturing by developing an environmentally sustainable etching process that eliminates the use of halogenated compounds.

Funded by the European Union, this innovative initiative brings together leading experts from academia, research institutions, and industry to address the critical need for greener manufacturing technologies. By leveraging cutting-edge plasma etching techniques and advanced materials science, HaloFreeEtch strives to reduce the environmental footprint of semiconductor production while maintaining high performance and cost-effectiveness.

The project’s interdisciplinary consortium ensures a holistic approach, fostering collaboration and knowledge exchange across different fields.

Objectives of the project:

  • Innovation in Etching Technology
    Creating novel etching processes that replace harmful halogenated compounds with environmentally friendly alternatives.

  • Sustainability 
    Significantly reducing the environmental impact of semiconductor manufacturing by minimizing hazardous waste and lowering energy consumption.
  • High Performance 
    Ensuring that the new etching techniques meet or exceed the performance standards of current technologies, without compromising on quality or efficiency.
  • Scalability 
    Developing scalable solutions that can be easily integrated into existing manufacturing workflows and adopted by the semiconductor industry at large.
  • Cost-Effectiveness 
    This means optimizing the production techniques to reduce costs and make the adoption of these greener technologies financially viable for semiconductor manufacturers.
  • Knowledge Transfer 
    By promoting knowledge exchange and joint development efforts, the project aims to accelerate the adoption of innovative technologies and ensure that the latest advancements are quickly translated into practical applications.
  • Regulatory Compliance 
    Ensuring that the new etching processes comply with current and future environmental regulations. This proactive approach will help semiconductor manufacturers stay ahead of regulatory changes and avoid potential compliance issues.
  • Educational Outreach
    Part of the project’s objective is to educate and train the next generation of scientists and engineers in sustainable manufacturing practices. This involves developing educational materials, organizing workshops, and creating opportunities for hands-on learning experiences.
  • Market Readiness 
    Preparing the new technologies for market entry by conducting thorough testing, validation, and optimization. This step is crucial to ensure that the halogen-free etching processes are ready for large-scale adoption and can be seamlessly integrated into existing production lines.

Impacts

The HaloFreeEtch project aims to significantly impact both the semiconductor industry and the environment by eliminating the use of harmful halogenated compounds in etching processes. This reduction in ecological footprint aligns with global efforts to combat climate change and promote sustainable practices.

The project will enhance the European semiconductor industry’s competitiveness by developing cutting-edge, environmentally compliant technologies, essential as the EU enforces stricter regulations on fluorochemicals. This innovation will lower costs and improve compliance with environmental standards.

Furthermore, the project will establish a sustainability assessment model to track carbon footprints and energy consumption, setting new standards for eco-friendly process development in electronics.

In summary, HaloFreeEtch will drive sustainable and competitive advancements in semiconductor manufacturing, positioning Europe at the forefront of technological innovation.

The Role of LioniX International

LioniX International focuses on the practical implementation and commercialization of the project’s innovations. Our role includes integrating the new etching processes into semiconductor manufacturing lines and demonstrating their feasibility and advantages in an industrial context.

FURTHER INFORMATION:

🌐 Visit the project’s website for all the details of the full objectives and project partners

🌐 Follow the project and its progress on the official LinkedIn page